UV-Litho-Y

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  Model 6000

  $55,000.00

  Model 6000 – Fully Automated Mask Aligner for High Volume Production

  • Flexibility to handle wafer sizes 4” (100mm) to 12” (300mm)
  • Highly optimized yields (200 wph in 1st mask mode)
  • Cognix Vision Pro with customized software
  • Automatic Wedge Effect Leveling
  • Unlimited recipe storage
  • Superb process repeatability
  • Cluster tool integration
  • Front and backside alignment
  • Accurate top to bottom auto alignment
  • Optional UV LED upgrade
  • Optional SECS/GEM Interface upgrade

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  UV-Litho-S

  $3,600.00

  • Minimum Line width:    1.0 um
  • Minimum Feature size: 0.8 um
  • Writing Speed: 1,200 mm²/min @ 1.0 um
  • 3,000mm²/min @  5.0 um
  • Light source: LD 405nm / 375nm
  • XY distance:  55mm
  • Overlay Accuracy: 200nm
  • Minimum sample size: 1 inch x 1 inch
  • Maximum sample size: 8 inch x 8 inch

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  Model 200

  $6,800.00

  Model 200 – Tabletop Contact Mask Aligner

  • Flexible with easy change of substrates and masks
  • Substrates can be small with pieces up to 8”
  • High quality printing resolution
  • Available with near, mid, and deep UV

  Options:

  • UV LED Lightsource
  • IR Backside Alignment
  • Nano Imprint Module
  • Vibration Isolation Table

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  Model 212

  $5,600.00

  Model 212 – Tabletop Mask Aligner for substrates up to 300mm

  • Designed for substrates up to 12” (300 x300 mm)
  • Precision alignment
  • Low cost R&D tool for large area substrates
  • Used for pkg, displays and 300mm wafers

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  PL-3D-PD

  Premium 3D Lithography PL-3D-PD

  • Lithography Accuracy: 2um / 5um
  • Minimum Print Thickness: 5 um
  • Maximum sample size: 50mm x 50 mm
  • Single exposure area: 3.84mm*2.16mm @ 2um / 9.60mm*5.40mm @ 5 um

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