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Inficon – VSA200
$0.00
Advantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
Related products
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Inficon – Trigon BCG552
$0.00Add to cartAdvantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – IRC081
$0.00Add to cart- Operating and display solution for accurate vacuum pressure measurement
- User control on all IRG080 gauge parameters set
- Simple manual operation with 5 potentiometers
- User Interface connection via USB-B port to PC
- PC Software in LabVIEWTM
- Data log and parameter log functionality
- External port for status and vacuum interlock
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Inficon – PPG570
$0.00Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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