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Manufacturer: OAI

OAI

Showing all 3 results

  • Model 2000

    $48,000.00

    Model 2000 – Flood or Optical Edge Exposure System

    • Handles wafer sizes up to 8 inches
    • Windows based graphic user interface
    • Cassette-to-cassette robotic handling
    • Stores and logs process data
    • Remote diagnostics feature
    • High efficiency automated production system available with near, mid, and deep UV exposure
    • Highly stable and precise Intensity Controlling Power Supply
    • Optional UV LED upgrade
    • Optional SECS/GEM upgrade
    Add to cart
  • Model 2012

    $56,700.00

    Model 2012 – 300mm Optical Edge or Flood Exposure System

    • Handles 200 or 300mm wafers (8” -12”)
    • Has automated foup loading or cassette to cassette handling
    • Up to 8kw Collimated Beam Light Source
    • Bar code reader and remote diagnostic
    • Semi safety compliant
    • Windows graphic user interface
    • Remote diagnostics

    Add to cart
  • Model 800E

    $87,990.00

    Model 800E – Semi-Automated Mask Aligner for Front or Backside Mask Alignment

    • 3-point automatic wafer leveling
    • Windows 10 operating system with unlimited recipe storage
    • Remote diagnostics
    • Motorized joy stick: allows fast mode to target and precise mode for precision alignment
    • One touch from standard view to wide angle view with
    • no resolution loss
    • IR lamp kit available
    • Optional UV LED upgrade
    Add to cart

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