Showing 33–48 of 58 results

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  Inficon – PSG010, PSG017 & PSG018

  Advantages

  • Elastomer (PSG010) or metal-sealed (PSG017, PSG018) design
  • Specified high measurement accuracy and repeatability
  • Bake-out temperature up to 100 °C (PSG010) / 250 °C (PSG017, PSG018)
  • Ionizing radiation resistant up to 10⁶ Gy (PSG017, PSG018)
  • Corrosion resistance with Ni filament (PSG017)
  • Cable length up to 100 m (500 m with PI 300 DL/CP 300 T11L)

  Typical applications

  • General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range

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  Inficon – PSG50x

  Advantages

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

  Typical applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

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  Inficon – PSG55x

  Advantages

  • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
  • Optional display, setpoints and digital interfaces
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal and various plug versions for easy integration
  • Mounts in any orientation – provides engineering freedom in tool design
  • Diagnostic port on all versions
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  •  Fore vacuum pressure measurement
  •  Safety circuits in vacuum systems
  •  General vacuum measurement and control from low to the high vacuum range

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  Inficon – SK CDG025D

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

  Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – SKY CDG025D-X3

  Benefits

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Wide range power supply
  • 2 setpoints
  • RS232 interface
  • Clean room compliant

  Typical applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – SKY CDG025D-X3, 4-20mA

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Interface with 2-wire current loop
  • Long cable distance (<300m)
  • Low energy gauge
  • Remote zero included
  • Clean room compliant
  • Status LED

  Typical applications

  • Chemical vacuum
  • Energy application
  • Industrial vacuum equipment

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  Inficon – SKY CDG045D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements

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  Inficon – SKY CDG100D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

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  Inficon – SKY CDG160D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

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  Inficon – SKY CDG200D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

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  Inficon – Spot CDS500D

  Advantages

  • The miniature sensor offers a high accuracy
  • Excellent repeatability and long-term stability
  • Weldable feedthrough for custom integration and calibration, or welded custom flange for integration of factory calibrated sensor
  • Sensor electronics with SPI interface for easy integration
  • Fast response time

  Typical applications

  • For integration into custom vacuum instrumentation and systems

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  Inficon – Spot CDS530D

  Advantages

  • The dual miniature sensor offers a high accuracy in a wide measurement range
  • Wide range, high precision
  • Excellent repeatability and long-term stability
  • Sensor electronics with SPI interface for easy integration
  • Welded custom flange for integration of calibrated sensor
  • Fast response time

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  Inficon – Stripe CDG045Dhs

  Advantages

  • High productivity – Faster than 2 ms response time (FS > 50 mTorr)
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

  Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

   

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  Inficon – Stripe CDG100Dhs

  Advantages

  • High productivity – Faster than 2 ms response time
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

  Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

   

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  Inficon – Trigon BAG552

  Advantages

  • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
  • 2 filaments for Bayard-Alpert system
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotateable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the high to ultra high vacuum range

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  Inficon – Trigon BCG552

  Advantages

  • 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
  • 2 filaments for Bayard-Alpert system
  • Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
  • Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Set point relays
  • Bright & big OLED display (90° rotatable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • Backwards compatible to TripleGauge® BCG450
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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