Category: Spare Parts
Spare Parts
Showing 49–64 of 138 results
-
GLD-040
$0.00Add to cartStandard Type
- Pumping Speed: 40 L/min (50Hz), 48 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 200W, 4P, Capacitor run
- Full Load Current: 1.5A
- Weight: 21.0 kg
- Inlet/Outlet Diameter: Rc 1/4
- Dimensions: 215(W) × 370(L) × 375(H) mm
-
GLD-137AA
$0.00Add to cartStandard Type
- Pumping Speed: 135 L/min (50Hz), 162 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 400W, 4P, Capacitor run
- Full Load Current: 2.0A
- Weight: 38.0 kg
- Inlet/Outlet Diameter: Rc 1/2
- Dimensions: 320(W) × 480(L) × 480(H) mm
-
GLD-137CC
$0.00Add to cartStandard Type
- Pumping Speed: 135 L/min (50Hz), 162 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 400W, 4P, Capacitor run
- Full Load Current: 2.0A
- Weight: 38.0 kg
- Inlet/Outlet Diameter: Rc 1/2
- Dimensions: 320(W) × 480(L) × 480(H) mm
-
GLD-202AA
$0.00Add to cartStandard Type
- Pumping Speed: 200 L/min (50Hz), 240 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 750W, 4P, Capacitor run
- Full Load Current: 4.0A
- Weight: 65.0 kg
- Inlet/Outlet Diameter: Rc 1/2
- Dimensions: 380(W) × 560(L) × 530(H) mm
-
GLD-202BB
$0.00Add to cartStandard Type
- Pumping Speed: 200 L/min (50Hz), 240 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 750W, 4P, Capacitor run
- Full Load Current: 4.0A
- Weight: 65.0 kg
- Inlet/Outlet Diameter: Rc 1/2
- Dimensions: 380(W) × 560(L) × 530(H) mm
-
GLD-280A
$0.00Add to cartStandard Type
- Pumping Speed: 280 L/min (50Hz), 336 L/min (60Hz)
- Ultimate Pressure: 6.7 × 10⁻³ Pa
- Motor: Single-phase, 220V, 1000W, 4P, Capacitor run
- Full Load Current: 5.0A
- Weight: 85.0 kg
- Inlet/Outlet Diameter: Rc 3/4
- Dimensions: 500(W) × 750(L) × 680(H) mm
-
Heating E-chips
$0.00Add to cartHeating E-chips
- Dynamic In-situ TEM Experiment
- Supports temperatures: up to 1,200°C
- Use for thermal analysis of materials in different environments
- Models: Fusion AX, Poseidon AX, Atmosphere AX, Triton AX Heating E-chips
-
Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
-
Inficon – BAG055
$0.00Add to cartAdvantages
- Long standing, reliable and proven gauge head design
- Drop-in replacement thanks to its compact size, large choice of connection flanges and fittings
- Dual yttrium oxide coated iridium filament cathode assembly
- Electron bombardment (EB) degassing
Typical applications
- Industrial or R&D applications requiring precise vacuum measurement in the high vacuum range
-
Inficon – BAG05x
$0.00Add to cartAdvantages
- Long standing, reliable and proven gauge head design
- Drop-in replacement for most nude hot ion gauge heads
- Wide range of emission currents (100 μA to 10 mA)
- Available with single/dual yttrium oxide coated iridium and dual tungsten filament cathode assemblies
- Degas: all models can be degassed using in electron bombardment (EB), BAG051, BAG052 and BAG053 can also be degassed using resistive degas (I2R)
Typical applications
- Industrial or R&D applications requiring precise vacuum measurement in the high/ultra-high vacuum range and high temperature bake-out
-
Inficon – BAG302
$0.00Add to cartAdvantages
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – BAG402
$0.00Add to cartAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – BCG450
$0.00Add to cartAdvantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
-
Inficon – BPG400
$0.00Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – BPG402-Sx
$0.00Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – Cube CDGsci
$0.00Add to cartAdvantages
- True high precision pressure measurement – Ceramic technology
- Full stable output – Proven by PTB
- Flexible communication – Various modern interfaces
- All functions integrated – No controller required
- Direct mounting to chamber – Optimized center of gravity
- Transportation without isolation valve possible
Typical applications
- Transfer standard
- Main reference gauge
- Research
- In-house standard
