Category: Spare Parts
Spare Parts
Showing 81–93 of 93 results
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Inficon – VSA100A
Add to cartAdvantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical applications
- Control of load lock chambers
- Safety shutdown of vacuum systemselastic diaphragm
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Inficon – VSA200
Add to cartAdvantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
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Inficon – VSC150A
Add to cartAdvantages
- High switching accuracy (± 0.1 mbar)
- Stable long term operating characteristics
- Rugged, corrosion protected design
Typical Applications
- Pressure switch or differential pressure switch to control valves, pumps, power supplies
- Load lock chambers
- Process chambers
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Inficon – VSD200
Add to cartAdvantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
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Inficon- TPG36x
Add to cartAs multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10Â to 1500 mbar (10-10Â to 1125 Torr).
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OAI 308 UV Meter
$3,500.00Add to cartMeter:
• RoHS2 and CE Compliant
• Detachable single or dual wavelength probes
• Auto ranging, digital display
• Light intensity measured in milliwatts/cm2
• Accuracy is traceable to NIST
• High speed port available for data logging
• Optional data logging software -
OAI 656 UV Meter
$3,500.00Add to cartMeter:
• Use with Contact/Proximity Aligners
• Extremely accurate and reliable
• Easily download measurements
• Range of up to 2,000 mW/cm2
• Memory up to 400 measurements
• ROHS2 and CE compliantProbes:
Probe wavelengths (nm)
220, 248, 254, 260, 310, 325, 365, 380, 400, 420, 436 and 540
Multi-layer absorption
dielectric filters -
OAI 659 UV Meter
$3,500.00Add to cartMeter:
Can be used with any Wafer Stepper
• Extremely accurate and reliable
• Perfect for High Intensity Wafer Steppers
• Easily download measurements
• Range of up to 7,500mW/cm2
• Memory up to 400 measurements
• ROHS2 and CE compliantProbes
• Designed for each individual stepper to fit on the stage of the stepper
• Probe wavelengths (nm) 365, 400, 420, 436
• Multi-layer absorption dielectric filters
• Interchangeable with any OAI Model 659 Meter -
OAI UV Meters Calibration
$1,800.00Add to cartCalibration of different types of OAI Meters, such as 308 Meter, 306 Meter, 358 meter, 459 Meter, etc.
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Ultrasonic Cleaner
$1,800.00Add to cartCapacity: Max 15L
Ultrasonic Power: Max 500W
Interior Tank Dimension: 330 x 300 x150mm
Exterior Unit Dimension: 360 x 330 x 330mm
Sonic Frequency: 40 Khz
Timer: 80c Transducer: 6
Power Supply: 110V- 220V/50Hz
Net Weight: 10.5kg
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