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  Inficon – Gemini MxG5xx

  Advantages

  • Long lifetime in harsh environments
  • Low magnetic stray field
  • Reliable fast ignition
  • Fastest maintenance – replaceable insert
  • Compact size – easy to integrate
  • Corrosion proof feed-through & sensor element
  • Selectable measuring current
  • 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
  • PROFINET, EtherCAT and RS232/ RS485 digital interace

  Typical applications

  • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
  • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
  • Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.

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  Inficon – MAG050, MAG060, MAG070

  Advantages

  • Reliable and proven gauge head design, based on the inverted magnetron principle
  • Large vacuum pressure measurement range capability from 1×10^-11 (MAG070) to 5×10^-3  mbar
  • Bakeable to 150 °C (MAG050) or 250 °C (MAG060, MAG070)
  • Good ignition properties
  • Corrosion resistant with ceramic feedthrough
  • Radiation resistant design available (MAG060, MAG070)
  • Easy to maintain, low cost of ownership

  Typical applications

  • General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range

   

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  Inficon – MAG084

  Advantages

  • Developed to sustain operation in strong external magnetic fields
  • Reliable and proven gauge head design, based on the inverted magnetron principle
  • Innovative double ionization chamber principle
  • Bakeable to 230 °C
  • Good ignition properties
  • Corrosion resistant with ceramic feedthrough
  • Radiation resistant design to 1×10⁷ Gy
  • Easy to maintain, low cost of ownership

  Typical applications

  • Special Fusion and R&D applications presenting strong external magnetic fields

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  Inficon – MAG470

  Advantages

  • No filament to burn out
  • Extended version, sensor bakeout up to 250°C
  • Excellent ignition properties
  • Easy to clean
  • Metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • Ultra high vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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  Inficon – MPG40X

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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