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  Inficon – Edge CDG025D2

  Advantages

  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, PVD and other semiconductor production processes
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – Edge CDG045D2

  Advantages

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  CVD, Etch, PVD and other semiconductor production processes

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  Inficon – Edge CDG100D2

  Advantages

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  CVD, Etch, PVD and other semiconductor production processes

  Add to cart
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  Inficon – Stripe CDG045Dhs

  Advantages

  • High productivity – Faster than 2 ms response time (FS > 50 mTorr)
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

  Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

   

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  wishlist

  

  Inficon – Stripe CDG100Dhs

  Advantages

  • High productivity – Faster than 2 ms response time
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

  Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

   

  Add to cart