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Tag: evaporator

evaporator

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  • High Vacuum Systems-NANO 36

    • Thermal evaporator
    • Process Chamber Construction: 304L Stainless Steel with 6061 Aluminum
    • Magnetron Sputtering Sources: 3
    • Thermal Evaporation Sources: 4
    • Low Temperature Evaporation Sources (LTE): 4
    • Deposition Orientation: Sputter Up, Evaporation Up
    • Platen: Heating Up to 350°C / Water-Cooling
    • Substrate Size: (max) 100mm x 100mm, 150mm Dia
    • Standard Vacuum Pumping: 260 l/sec Turbo Pump

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  • VPC-061 Vacuum Coater

    VPC-061 Vacuum Coater

    • Ultimate Pressure: 1.3 × 10⁻³ Pa, 6.6 × 10⁻⁴ Pa (LN₂)
    • Evacuation Time: 4.0 × 10⁻³ Pa/20min, 1.3 × 10⁻³ Pa/20min (LN₂)
    • Bell Jar Size: Glass belljar (dia. 150mm × 200mm(H))
    • Substrate Electrode Distance: Max 100mm
    • Evaporation Electrode Structure: 1 point
    • Recommended Substrate Size (Maximum Substrate Size): sq.25mm (sq.50mm)
    • Evaporation Power Supply: 0–10V 50A (Max)
    • Main Pump: Oil diffusion pump (air cooling) 50 L/sec
    • Backing Pump: Oil rotary vacuum pump 20 L/min
    • Liquid Nitrogen Trap: Equipped
    • Automatic Leak Valve: –
    • Control System: Manual control
    • Weight (Body): 38kg
    • Weight (Power Supply): 40kg
    • Overall Dimensions (Body): 434mm(W) × 422mm(D) × 673mm(H)
    • Overall Dimensions (Power Supply): 480mm(W) × 435.3mm(D) × 149mm(H)
    • Power Requirement (Body): Single phase, 50/60Hz, 100V, 0.63kVA
    • Power Supply: Single phase, 50/60Hz, 100V, 0.63kVA
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