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Tag: Longtermstability and longevity

Longtermstability and longevity

  • Inficon – BAG402

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    Advantages

    • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
    • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
    • Overpressure detection protects the filament from premature burnout
    • Two long-life yttrium oxide coated iridium filaments
    • Automatic emission current selection reduces control complexity
    • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
    • RoHS compliance

    Typical applications

    • Pressure measurement in semiconductor process and transfer chambers
    • Industrial coating
    • General vacuum measurement and control in the low to ultra high vacuum range
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