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Tag: thermal system

thermal system

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  • High Vacuum Systems-NANO 36

    • Thermal evaporator
    • Process Chamber Construction: 304L Stainless Steel with 6061 Aluminum
    • Magnetron Sputtering Sources: 3
    • Thermal Evaporation Sources: 4
    • Low Temperature Evaporation Sources (LTE): 4
    • Deposition Orientation: Sputter Up, Evaporation Up
    • Platen: Heating Up to 350°C / Water-Cooling
    • Substrate Size: (max) 100mm x 100mm, 150mm Dia
    • Standard Vacuum Pumping: 260 l/sec Turbo Pump

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