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  Inficon – BCG450

  Advantages

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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  Inficon – VSA100A

  Advantages

  • Reliable and budget-priced vacuum switch
  • High life time
  • Rugged design
  • Easy to integrate
  • IP 44 protection

  Typical applications

  • Control of load lock chambers
  • Safety shutdown of vacuum systemselastic diaphragm

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  Inficon – VSA200

  Advantages

  • Corrosion resistant all stainless steel design
  • Robust design, cleanroom compliant
  • Easy installation with setpoints factory preset or field-adjustable

  Typical Applications

  • Atmospheric pressure detection for all vacuum applications
  • Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
  • Vacuum to high vacuum

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  Inficon – VSC150A

  Advantages

  • High switching accuracy (± 0.1 mbar)
  • Stable long term operating characteristics
  • Rugged, corrosion protected design

  Typical Applications

  • Pressure switch or differential pressure switch to control valves, pumps, power supplies
  • Load lock chambers
  • Process chambers

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  Inficon – VSD200

  Advantages

  • Corrosion resistant all stainless steel design
  • Robust design, cleanroom compliant
  • Easy installation with setpoints factory preset or field-adjustable

  Typical Applications

  • Atmospheric pressure detection for all vacuum applications
  • Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
  • Vacuum to high vacuum

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