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Inficon – Augent OPG550
$0.00
Advantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
Related products
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Inficon – BAG302
$0.00Add to cartAdvantages
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – PPG570
$0.00Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – BCG450
$0.00Add to cartAdvantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – PSG50x
$0.00Add to cartAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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