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Inficon – MAG084
$0.00
Advantages
- Developed to sustain operation in strong external magnetic fields
- Reliable and proven gauge head design, based on the inverted magnetron principle
- Innovative double ionization chamber principle
- Bakeable to 230 °C
- Good ignition properties
- Corrosion resistant with ceramic feedthrough
- Radiation resistant design to 1×107 Gy
- Easy to maintain, low cost of ownership
Typical applications
- Special Fusion and R&D applications presenting strong external magnetic fields
Related products
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Inficon – BAG402
$0.00Add to cartAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – PGE300
$0.00Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
- Bright digital LED display features a user friendly for calibration and operation
- 3 optional analog output signals (user selectable)
- Factory pre-set analog output signal or selectable via user interface
- Factory pre-set display units or selectable via user interface
- User programmable set point relays
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control from low to the high vacuum range
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – Trigon BCG552
$0.00Add to cartAdvantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – MAG470
$0.00Add to cartAdvantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
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