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Inficon – MAG470
Advantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Related products
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Inficon – PSG50x
Add to cartAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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Inficon – Augent OPG550
Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – PSG55x
Add to cartAdvantages
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation – provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Â Fore vacuum pressure measurement
- Â Safety circuits in vacuum systems
- Â General vacuum measurement and control from low to the high vacuum range
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Inficon – Porter CDG020D
Add to cartBenefits
- Excellent span stability – gas type independent
- Alumina sensor
- Compact, smallest size in it’s class
- Easy integration, any mounting orientation
- Digital signal processing
- Maintenance free
Typical applications
- Vacuum coating
- Vacuum monitoring
- Sterilization
- Food & packaging
- Vacuum oven, puller
- Analytical
- Chemical vacuum processes
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Inficon – HPG400
Add to cartAdvantages
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
Typical applications
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
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