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Inficon – PGE050
Advantages
- Convection enhanced Pirani technology for wide measurement range and higher accuracy near atmosphere
- Gold plated tungsten filament
- Mechanical robust and less susceptible to mechanical shock and vibration
- Large choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® Convectron® gauge sensor (same plug/ pinouts)
- PGE050 accepts Granville-Phillips® Convectron® controllers, cables and modules
- Ideal gauge sensor for upgrading your installed Pirani and thermocouple gauge
Typical applications
- General vacuum measurement and control from atmosphere to high vacuum range
Related products
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Inficon – BAG402
Add to cartAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – PGE500 DeviceNet
Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
- Bright digital OLED display with keypad for simple setup, calibration and operation
- Factory pre-set display units for measure or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament or platinum filament for corrosive applications
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Field replaceable spare sensor units
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – PPG570
Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
-
Inficon – PPG550
Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Use in Analytical equipment/ mass spectrometers
- Physical vapor deposition
- Fore-line measurement
- Gas-backfilling
-
Inficon – Gemini MxG5xx
Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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