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Inficon – SK CDG025D
$0.00
Advantages
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- One pushbutton zero function
- Wide range power supply
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – MAG470
$0.00Add to cartAdvantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
-
Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – PSG50x
$0.00Add to cartAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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Inficon – PGE500 RS485/ Analog
$0.00Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
- Bright digital OLED display with keypad for simple setup, calibration and operation
- 4 optional analog output signals (3 user selectable, 1 Default)
- Factory pre-set analog output signal or selectable via keypad
- Factory pre-set display units or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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