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Inficon – VSA200
$0.00
Advantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
Related products
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Inficon – PGE500 RS485/ Analog
$0.00Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
- Bright digital OLED display with keypad for simple setup, calibration and operation
- 4 optional analog output signals (3 user selectable, 1 Default)
- Factory pre-set analog output signal or selectable via keypad
- Factory pre-set display units or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – Trigon BCG552
$0.00Add to cartAdvantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – PPG570
$0.00Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
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Inficon – PSG55x
$0.00Add to cartAdvantages
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation – provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control from low to the high vacuum range
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Inficon – PBR 260
$0.00Add to cartAdvantages
- PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
- Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
- Maximum pressure applies to inert gases and temperatures of less then 55°C
- Highly accurate, excellent repeatability in the process range 10-8 … 10-2 mbar
- Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
- Long-life yttrium oxide coated iridium filament
- RoHS compliance
Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges
- Part number IGG27000 matches PT R27 000
- Part number IGG27001 matches PT R27 001
- Part number IGG27002 matches PT R27 00
Typical applications
- General pressure measurement in semiconductor and analytical process environment
- Optical and other industrial coating processes
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