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Qulee Reactive Gas Monitor
- Mass Range: 1 to 200 amu
- Resolution: M/ΔM = 1M (10% peak height)
- Sensitivity: 1×10⁻³ A/Pa
- Minimum Detectable Partial Pressure: 1×10⁻¹⁰ Pa
- Ion Source: Closed ion source with magnetic field
- Emission Current: 10 μA
- Bakeout Temperature: Maximum 120°C
- Pressure Range: 1×10⁻⁶ to 13 kPa
- Pumping System: Turbo molecular pump (67 L/s for N₂)
- Power Supply: AC 100V, 15A
- Weight: 57 kg (pumping system), 38 kg (controller)
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