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High Vacuum Systems-PRO Line PVD 75
• Process Chamber Construction: 304L Stainless Steel
• Electron Beam Source: Multi Pocket, 5kW or 10kW Power Supplies
• Thermal Evaporation: Up To Four, 4″ Individual Boats, Or Six 2″ Boat Assemblies
• Substrate Size: (max) 150mm Dia
• Standard Vacuum Pumping: Pfeiffer 790 L/s turbo molecular pump & Edwards dry pump
• Power supplies: DC, PDC, RF, MF, and HIPIMS
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VPC-061 Vacuum Coater
Add to cartVPC-061 Vacuum Coater
- Ultimate Pressure: 1.3 × 10⁻³ Pa, 6.6 × 10⁻⁴ Pa (LN₂)
- Evacuation Time: 4.0 × 10⁻³ Pa/20min, 1.3 × 10⁻³ Pa/20min (LN₂)
- Bell Jar Size: Glass belljar (dia. 150mm × 200mm(H))
- Substrate Electrode Distance: Max 100mm
- Evaporation Electrode Structure: 1 point
- Recommended Substrate Size (Maximum Substrate Size): sq.25mm (sq.50mm)
- Evaporation Power Supply: 0–10V 50A (Max)
- Main Pump: Oil diffusion pump (air cooling) 50 L/sec
- Backing Pump: Oil rotary vacuum pump 20 L/min
- Liquid Nitrogen Trap: Equipped
- Automatic Leak Valve: –
- Control System: Manual control
- Weight (Body): 38kg
- Weight (Power Supply): 40kg
- Overall Dimensions (Body): 434mm(W) × 422mm(D) × 673mm(H)
- Overall Dimensions (Power Supply): 480mm(W) × 435.3mm(D) × 149mm(H)
- Power Requirement (Body): Single phase, 50/60Hz, 100V, 0.63kVA
- Power Supply: Single phase, 50/60Hz, 100V, 0.63kVA
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High Vacuum Systems-NANO 36
Add to cart• Thermal evaporator
• Process Chamber Construction: 304L Stainless Steel with 6061 Aluminum
• Magnetron Sputtering Sources: 3
• Thermal Evaporation Sources: 4
• Low Temperature Evaporation Sources (LTE): 4
• Deposition Orientation: Sputter Up, Evaporation Up
• Platen: Heating Up to 350°C / Water-Cooling
• Substrate Size: (max) 100mm x 100mm, 150mm Dia
• Standard Vacuum Pumping: 260 l/sec Turbo Pump
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