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  Inficon – PGE300

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
  • Bright digital LED display features a user friendly for calibration and operation
  • 3 optional analog output signals (user selectable)
  • Factory pre-set analog output signal or selectable via user interface
  • Factory pre-set display units or selectable via user interface
  • User programmable set point relays
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control from low to the high vacuum range

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  Inficon – PGE500 DeviceNet

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • Factory pre-set display units for measure or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament or platinum filament for corrosive applications
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Field replaceable spare sensor units
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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  Inficon – PGE500 RS485/ Analog

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • 4 optional analog output signals (3 user selectable, 1 Default)
  • Factory pre-set analog output signal or selectable via keypad
  • Factory pre-set display units or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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  Inficon – Porter CDG020D

  Benefits

  • Excellent span stability – gas type independent
  • Alumina sensor
  • Compact, smallest size in it’s class
  • Easy integration, any mounting orientation
  • Digital signal processing
  • Maintenance free

  Typical applications

  • Vacuum coating
  • Vacuum monitoring
  • Sterilization
  • Food & packaging
  • Vacuum oven, puller
  • Analytical
  • Chemical vacuum processes

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  Inficon – PPG550

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  •  Digital interfaces RS232/ RS485
  • Compliance & standards: CE, EN, UL, CSA, RoHS
  • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Use in Analytical equipment/ mass spectrometers
  • Physical vapor deposition
  • Fore-line measurement
  •  Gas-backfilling

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  Inficon – PPG570

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  •  Atmospheric ambient pressure measurement
  • Up to 3 solid state relays
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  • Digital interfaces RS232/ RS485
  • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Semiconductor load-lock applications
  • Use in Analytical equipment/ mass sepctrometers
  • Physical vapor deposition
  • Physical vapor deposition

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  Inficon – PSG010, PSG017 & PSG018

  Advantages

  • Elastomer (PSG010) or metal-sealed (PSG017, PSG018) design
  • Specified high measurement accuracy and repeatability
  • Bake-out temperature up to 100 °C (PSG010) / 250 °C (PSG017, PSG018)
  • Ionizing radiation resistant up to 10⁶ Gy (PSG017, PSG018)
  • Corrosion resistance with Ni filament (PSG017)
  • Cable length up to 100 m (500 m with PI 300 DL/CP 300 T11L)

  Typical applications

  • General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range

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  Inficon – PSG50x

  Advantages

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

  Typical applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

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  Inficon – PSG55x

  Advantages

  • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
  • Optional display, setpoints and digital interfaces
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal and various plug versions for easy integration
  • Mounts in any orientation – provides engineering freedom in tool design
  • Diagnostic port on all versions
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  •  Fore vacuum pressure measurement
  •  Safety circuits in vacuum systems
  •  General vacuum measurement and control from low to the high vacuum range

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  Inficon – SK CDG025D

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

  Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – SKY CDG025D-X3

  Benefits

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Wide range power supply
  • 2 setpoints
  • RS232 interface
  • Clean room compliant

  Typical applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – SKY CDG025D-X3, 4-20mA

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Interface with 2-wire current loop
  • Long cable distance (<300m)
  • Low energy gauge
  • Remote zero included
  • Clean room compliant
  • Status LED

  Typical applications

  • Chemical vacuum
  • Energy application
  • Industrial vacuum equipment

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  Inficon – SKY CDG045D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements

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  Inficon – SKY CDG100D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

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  Inficon – SKY CDG160D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

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  Inficon – SKY CDG200D

  Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

  Add to cart