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High Vacuum Systems-PRO Line PVD 75
Add to cart• Process Chamber Construction: 304L Stainless Steel
• Electron Beam Source: Multi Pocket, 5kW or 10kW Power Supplies
• Thermal Evaporation: Up To Four, 4″ Individual Boats, Or Six 2″ Boat Assemblies
• Substrate Size: (max) 150mm Dia
• Standard Vacuum Pumping: Pfeiffer 790 L/s turbo molecular pump & Edwards dry pump
• Power supplies: DC, PDC, RF, MF, and HIPIMS -
High Vacuum Valve
$100.00Add to cartHigh Vacuum isolation valve for semiconductor, thin film, solar energy, surface treatment, communication, electronics, metallurgy, aviation, aerospace, light industry, chemical industry, food, medicine and other industries. Angle and straight type available. Sizes : KF16, KF25, KF40, KF50 Material: Stainless steel 304+ fluorine rubber + bellows shaft seal
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HMDS Pre-treatment System
$50,000.00Add to cartThe HMDS pre-treatment system allows controlled adjustment of parameters such as processing temperature, time, and dwell time, enabling uniform HMDS coating on wafer surfaces. This reduces the contact angle post-HMDS treatment, decreases the required amount of photoresist, and improves adhesion between the photoresist and wafer. Better Pre-treatment Performance The system performs HMDS treatment after multiple …
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HPB-4B
Add to cart- Individual temperature control for each device up to 600 W
- Test devices at a maximum temperature of 150°C with a liquid-cooled heat-sink per device
- Programmable clocks edges with 2-nanosecond edge resolution and 8 on-the-fly timing sets
- System capacity of 14 burn-in boards (112 devices)
- 12 vector formats per-pin per-cycle with memory testing extensions
- 19 programmable voltage regulators provide 2060 amps of device current per burn-in board
- High-speed clock programmable up to 800 MHz
- 128 I/O signals per board
- 64M vector memory, 8G scan
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HPB-5C+
Add to cart- Individual temperature control for each device up to 150 W
- Variable oven overflow control
- Individual pattern zone per burn-in board slot
- 32M vector memory standard, 64M optional
- Tests devices at a temperature of up to 150°C
- Up to 800 MHz clock rate
- 128 digital I/O channels per burn-in board
- System capacity of 384 devices under test with individual temperature control per device
- 16 programmable voltage regulators with 1080 amps of device under test power per burn-in board
- 8 high-current supplies
- (0-4 volts at up to 125 amps each)
- 8 low-current supplies
- (0-6 volts at up to 10 amps each)
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HPB-6
Add to cart- Handle devices up to 1000 watts
- 16 independent burn-in board slots
- 64M standard and 128M optional parallel vector depth –subroutine capable
- 8G scan vector depth
- 128 formatted vector I/O channels plus 128 vector output-only channels
- 8 programmable high-frequency clocks, up to 350 MHz – LVDS to the BiB
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I-V Testing System
Add to cart- Standalone or integrated with the OAI I-V Measurement System
- I-V Test Systems: Standalone or fully Integrated with any OAI Solar Simulator
- Extremely accurate measurements of solar cell I-V
- Parameters & efficiency
- Propritary IV Rider Software measuring critical I-V Parameters
- Standard ranges of I-V testers are: S1a, 1-5A, and 20A – verified at Fraunhofer, ISE, & NREL.
- Multiplexing function to test various solar cells
- Measures up to +/- 35A/ +/-10V/350w I-V RANGE
- Features corrected I-V curves & Graphical/ Tabular QC monitoring
- Optional Normalization Kit to correct any lamp instability
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Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – BAG055
$0.00Add to cartAdvantages
- Long standing, reliable and proven gauge head design
- Drop-in replacement thanks to its compact size, large choice of connection flanges and fittings
- Dual yttrium oxide coated iridium filament cathode assembly
- Electron bombardment (EB) degassing
Typical applications
- Industrial or R&D applications requiring precise vacuum measurement in the high vacuum range
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Inficon – BAG05x
$0.00Add to cartAdvantages
- Long standing, reliable and proven gauge head design
- Drop-in replacement for most nude hot ion gauge heads
- Wide range of emission currents (100 μA to 10 mA)
- Available with single/dual yttrium oxide coated iridium and dual tungsten filament cathode assemblies
- Degas: all models can be degassed using in electron bombardment (EB), BAG051, BAG052 and BAG053 can also be degassed using resistive degas (I2R)
Typical applications
- Industrial or R&D applications requiring precise vacuum measurement in the high/ultra-high vacuum range and high temperature bake-out
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Inficon – BAG302
$0.00Add to cartAdvantages
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – BAG402
$0.00Add to cartAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – BCG450
$0.00Add to cartAdvantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – BPG400
$0.00Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – BPG402-Sx
$0.00Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – Cube CDGsci
$0.00Add to cartAdvantages
- True high precision pressure measurement – Ceramic technology
- Full stable output – Proven by PTB
- Flexible communication – Various modern interfaces
- All functions integrated – No controller required
- Direct mounting to chamber – Optimized center of gravity
- Transportation without isolation valve possible
Typical applications
- Transfer standard
- Main reference gauge
- Research
- In-house standard
