Inficon – SKY CDG025D-X3, 4-20mA

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  Inficon- TPG36x

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  As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10^-10 to 1500 mbar (10^-10 to 1125 Torr).

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  Inficon – HPG400

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  Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10^-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

  Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

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  Inficon – PSG55x

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  Advantages

  • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
  • Optional display, setpoints and digital interfaces
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal and various plug versions for easy integration
  • Mounts in any orientation – provides engineering freedom in tool design
  • Diagnostic port on all versions
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  •  Fore vacuum pressure measurement
  •  Safety circuits in vacuum systems
  •  General vacuum measurement and control from low to the high vacuum range

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  Inficon – PGE500 RS485/ Analog

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  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • 4 optional analog output signals (3 user selectable, 1 Default)
  • Factory pre-set analog output signal or selectable via keypad
  • Factory pre-set display units or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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  Inficon – MPG40X

  $0.00

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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