Inficon – SKY CDG025D-X3, 4-20mA

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  Inficon – PSG55x

  Advantages

  • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
  • Optional display, setpoints and digital interfaces
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal and various plug versions for easy integration
  • Mounts in any orientation – provides engineering freedom in tool design
  • Diagnostic port on all versions
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  •  Fore vacuum pressure measurement
  •  Safety circuits in vacuum systems
  •  General vacuum measurement and control from low to the high vacuum range

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  Inficon – PGE500 DeviceNet

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • Factory pre-set display units for measure or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament or platinum filament for corrosive applications
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Field replaceable spare sensor units
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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  Inficon – MPG40X

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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  Inficon – Porter CDG020D

  Benefits

  • Excellent span stability – gas type independent
  • Alumina sensor
  • Compact, smallest size in it’s class
  • Easy integration, any mounting orientation
  • Digital signal processing
  • Maintenance free

  Typical applications

  • Vacuum coating
  • Vacuum monitoring
  • Sterilization
  • Food & packaging
  • Vacuum oven, puller
  • Analytical
  • Chemical vacuum processes

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  Inficon – BPG402-Sx

  Advantages

  • Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
  • Pirani interlock protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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