Manufacturer | |
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Part Number | |
Status | Available, Instock |
“Model 6000A” has been added to your cart. View cart
UV-Litho-Y
$6,400.00
- Minimum Line width: 1.5um
- Minimum Feature size: 1.2um
- Writing Speed: 10 mm2/min @ 1.5um
- Light source: LED 405nm / 385nm
- XY distance: 55mm
- Overlay Accuracy: 500nm
- Minimum sample size: 3mm x 3mm
- Maximum sample size: 50mm x 50 mm
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